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  1. Lams SABRE ® ECD product family, which helped pioneer the copper interconnect transition, offers the precision needed for copper damascene manufacturing on the industry’s productivity-leading platform.

  2. Environmental Health & Safety. 2050 Net Zero Strategy. Responsible Supply Chain. Our Communities. Sustainable Operations. Sustainable Product Innovation. Lam Research ESG Report. Subsidiaries. Silfex.

  3. SABRE Product Family Electrochemical Deposition (ECD) This product family offers precision metal plating for copper damascene manufacturing on the industry’s productivity-leading ECD platform.

  4. Jul 2, 2015 · SABRE® 3D is a next-generation electroplating product designed to meet leading-edge production requirements for advanced packaging applications. This product leverages proprietary front-end manufacturing technology and offers market-specific solutions for copper pillar and through-silicon via (TSV) fabrication.

  5. Nov 2, 2022 · Lam Research has formulated three strategies to help customers overcome MEMS’s high-volume manufacturing challenges: Leverage Lam’s leading-edge technology to enable MEMS process capability. Address MEMS and sensor customers’ high value challenges. Be a partner in MEMS and sensor development and process optimization.

  6. May 11, 2020 · Lam addresses this issue with a proprietary process called Durendal®. It yields high-quality, smooth surfaces at the tops of the megapillars and uniform megapillar height across the wafer. The entire Durendal® process can be performed on the SABRE® 3D tool.

  7. Jul 10, 2006 · SABRE Extreme marks another milestone for Novellus' SABRE Electrofill tool, the semiconductor industry's first production-worthy copper electroplating system. With a market share of 80% in 2005, SABRE is the process tool of record for nine of the top 10 copper IC producers.